the flow control of slurry and aggressive fluids in semiconductor and clean-area applications is simplified by a new fluoropolymer diaphragm valve from the partek operation of parker hannifin. called the 20 series, the valve features a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media. as a result, the 20 series valve offers a life of more than a million cycles in slurry applications. compliant with the semi-f57-0301 standard for polymer components, partek's new valve has a body machined from virgin 100% ultra-high purity ptfe for superior chemical resistance, and a one-piece, precision-machined diaphragm. it is available initially in three orifice sizes of 1/4, 1/2 and 1in, with port sizes ranging from 1/4 to 1-1/4in, and can be supplied with industry-standard parflare or nippon pillar s300 end connections. the design of the valve is optimized to save critical clean room and sub-fab space; for example, the 1/4in version has a body size measuring 1.5 x 1.25 x 2.91in (l x w x h). both manual and pneumatically actuated configurations are available.